Alloy material: Zn-Al /Melting point 380 ℃/conductivity 6.5µΩ.cm(~25%of Cu)
Process temperature:~425 ℃
4''晶圆TSV填充后图片
盲孔TSV剖面图
通孔TSV剖面图
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MEMS SOLENOIDS WITH MAGNETIC CAVITY
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μCasting ™ solenoid coil is fabricated by silicon bulk etching and MEMS-Casting technology. µCasting ™ solenoid is considered as the next generation chip-type solenoid.