Application Cases

THROUGH VIA FILLING FOR ADVANCED PACKAGING

Technical specifications

SubstrateSilicon/Glass/Ceramics

Via:Depth/Diameter>20um

Via Type:Through hole/Blind hole

Need CMP: Yes

Alloy material: Zn-Al /Melting point 380 /conductivity 6.5µΩ.cm(~25%of Cu)

Process temperature:~425 ℃

MEMS SOLENOIDS WITH MAGNETIC CAVITY

μCasting ™ solenoid coil is fabricated by silicon bulk etching and MEMS-Casting technology. µCasting ™ solenoid is considered as the next generation chip-type solenoid.

Technical specifications

Turn number:5~200 

Line width:>20 μm

Line spacing:>20 μm

RF DEVICE

MEMS-Casting(tm)  technology can be used for manufacture of RF devices, e.g. chip-type micro-coaxial transmision, distributed filter, etc.

Fanout

MEMS-Casting technology for manufacturing of complex 3D fanout structure